KLA-Tencor Surfscan 5500 Inspection System

Status

sold

Manufacturer

KLA-Tencor

Model

Surfscan 5500

Lot Number

L3301

Notes

KLA-Tencor Surfscan 5500 Inspection System

· Handles high scattering surfaces such as metals, polysilicon, and CVD films.

· Map locations size available for each particle.

· Can handle from 2\" to 8\" wafers

· Submicron sensitivity, detects 0.2 micron particles

· Surface haze detected as low as 0.3 ppm

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